Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)
Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate) is a paper indexed in PICO Portal from OpenAlex.
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Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate) has 240 citations in the OpenAlex counts PICO Portal stores.
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Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate) has 2004 year in the PICO Portal index.
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