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Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
JournalCitation impact & published research
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena is a journal indexed in PICO Portal from OpenAlex.
What is the OpenAlex record for Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena?
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The OpenAlex for Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena is on the source record.
What are the most-cited papers on Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena?
PICO Portalmost cited works
Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)
Walter Hu, K. Sarveswaran, Marya Lieberman, Gary H. Bernstein