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Journal of Micro/Nanolithography MEMS and MOEMS

JournalCitation impact & published research

Journal of Micro/Nanolithography MEMS and MOEMS is a journal indexed in PICO Portal from OpenAlex.

How many works does Journal of Micro/Nanolithography MEMS and MOEMS have?

PICO Portalindexed works

Journal of Micro/Nanolithography MEMS and MOEMS has 1,675 works in the PICO Portal index. The count is the OpenAlex total, not the number of papers listed on this page.

How many citations does Journal of Micro/Nanolithography MEMS and MOEMS have?

PICO Portalcitation count

Journal of Micro/Nanolithography MEMS and MOEMS has 17,765 citations in the OpenAlex counts PICO Portal stores.

What is the h-index of Journal of Micro/Nanolithography MEMS and MOEMS?

PICO Portalh-index

Journal of Micro/Nanolithography MEMS and MOEMS has an h-index of 48 in OpenAlex.

What is the OpenAlex record for Journal of Micro/Nanolithography MEMS and MOEMS?

PICO Portalopenalex

The OpenAlex for Journal of Micro/Nanolithography MEMS and MOEMS is on the source record.

What are the most-cited papers on Journal of Micro/Nanolithography MEMS and MOEMS?

PICO Portalmost cited works
Deep learning-based detection, classification, and localization of defects in semiconductor processes
Dhruv Patel, Ravi Bonam, Assad A. Oberai
Journal of Micro/Nanolithography MEMS and MOEMS. 202025 Citations

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