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Virtual Metrology models for predicting physical measurement in semiconductor manufacturing

PaperCitations, authors & open-access status

Virtual Metrology models for predicting physical measurement in semiconductor manufacturing is a paper indexed in PICO Portal from OpenAlex.

How many citations does Virtual Metrology models for predicting physical measurement in semiconductor manufacturing have?

PICO Portalcitation count

Virtual Metrology models for predicting physical measurement in semiconductor manufacturing has 23 citations in the OpenAlex counts PICO Portal stores.

When was Virtual Metrology models for predicting physical measurement in semiconductor manufacturing published?

PICO Portalyear

Virtual Metrology models for predicting physical measurement in semiconductor manufacturing has 2009 year in the PICO Portal index.

What is the open-access status of Virtual Metrology models for predicting physical measurement in semiconductor manufacturing?

PICO Portaloa status

Virtual Metrology models for predicting physical measurement in semiconductor manufacturing has closed oa status in the PICO Portal index.

What is the DOI of Virtual Metrology models for predicting physical measurement in semiconductor manufacturing?

PICO Portaldoi

The DOI for Virtual Metrology models for predicting physical measurement in semiconductor manufacturing is on the source record.

What is the OpenAlex record for Virtual Metrology models for predicting physical measurement in semiconductor manufacturing?

PICO Portalopenalex

The OpenAlex for Virtual Metrology models for predicting physical measurement in semiconductor manufacturing is on the source record.

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