PICO Portalanswers from OpenAlex
Virtual metrology models for predicting avera PECVD oxide film thickne
PaperCitations, authors & open-access status
Virtual metrology models for predicting avera PECVD oxide film thickne is a paper indexed in PICO Portal from OpenAlex.
How many citations does Virtual metrology models for predicting avera PECVD oxide film thickne have?
PICO Portalcitation count
Virtual metrology models for predicting avera PECVD oxide film thickne has 10 citations in the OpenAlex counts PICO Portal stores.
When was Virtual metrology models for predicting avera PECVD oxide film thickne published?
PICO Portalyear
Virtual metrology models for predicting avera PECVD oxide film thickne has 2011 year in the PICO Portal index.
What is the open-access status of Virtual metrology models for predicting avera PECVD oxide film thickne?
PICO Portaloa status
Virtual metrology models for predicting avera PECVD oxide film thickne has closed oa status in the PICO Portal index.
What is the DOI of Virtual metrology models for predicting avera PECVD oxide film thickne?
PICO Portaldoi
The DOI for Virtual metrology models for predicting avera PECVD oxide film thickne is on the source record.
What is the OpenAlex record for Virtual metrology models for predicting avera PECVD oxide film thickne?
PICO Portalopenalex
The OpenAlex for Virtual metrology models for predicting avera PECVD oxide film thickne is on the source record.