Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process is a paper indexed in PICO Portal from OpenAlex.

How many citations does Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process have?

Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process has 71 citations in the OpenAlex counts PICO Portal stores.

When was Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process published?

Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process has 2018 year in the PICO Portal index.

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Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process has closed oa status in the PICO Portal index.

What is the DOI of Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process?

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The OpenAlex for Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process is on the source record.