Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing
Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing is a paper indexed in PICO Portal from OpenAlex.
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Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing has 139 citations in the OpenAlex counts PICO Portal stores.
When was Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing published?
Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing has 1998 year in the PICO Portal index.
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Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing has closed oa status in the PICO Portal index.
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