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Quality and exposure control in semiconductor manufacturing. Part I: Modelling

PaperCitations, authors & open-access status

Quality and exposure control in semiconductor manufacturing. Part I: Modelling is a paper indexed in PICO Portal from OpenAlex.

How many citations does Quality and exposure control in semiconductor manufacturing. Part I: Modelling have?

PICO Portalcitation count

Quality and exposure control in semiconductor manufacturing. Part I: Modelling has 20 citations in the OpenAlex counts PICO Portal stores.

When was Quality and exposure control in semiconductor manufacturing. Part I: Modelling published?

PICO Portalyear

Quality and exposure control in semiconductor manufacturing. Part I: Modelling has 2011 year in the PICO Portal index.

What is the open-access status of Quality and exposure control in semiconductor manufacturing. Part I: Modelling?

PICO Portaloa status

Quality and exposure control in semiconductor manufacturing. Part I: Modelling has closed oa status in the PICO Portal index.

What is the DOI of Quality and exposure control in semiconductor manufacturing. Part I: Modelling?

PICO Portaldoi

The DOI for Quality and exposure control in semiconductor manufacturing. Part I: Modelling is on the source record.

What is the OpenAlex record for Quality and exposure control in semiconductor manufacturing. Part I: Modelling?

PICO Portalopenalex

The OpenAlex for Quality and exposure control in semiconductor manufacturing. Part I: Modelling is on the source record.

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