PICO Portalanswers from OpenAlex
Model for a multiple-step deep Si etch process
PaperCitations, authors & open-access status
Model for a multiple-step deep Si etch process is a paper indexed in PICO Portal from OpenAlex.
How many citations does Model for a multiple-step deep Si etch process have?
PICO Portalcitation count
Model for a multiple-step deep Si etch process has 52 citations in the OpenAlex counts PICO Portal stores.
When was Model for a multiple-step deep Si etch process published?
PICO Portalyear
Model for a multiple-step deep Si etch process has 2002 year in the PICO Portal index.
What is the open-access status of Model for a multiple-step deep Si etch process?
PICO Portaloa status
Model for a multiple-step deep Si etch process has closed oa status in the PICO Portal index.
What is the DOI of Model for a multiple-step deep Si etch process?
PICO Portaldoi
The DOI for Model for a multiple-step deep Si etch process is on the source record.
What is the OpenAlex record for Model for a multiple-step deep Si etch process?
PICO Portalopenalex
The OpenAlex for Model for a multiple-step deep Si etch process is on the source record.