PICO Portalanswers from OpenAlex
Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process
PaperCitations, authors & open-access status
Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process is a paper indexed in PICO Portal from OpenAlex.
How many citations does Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process have?
PICO Portalcitation count
Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process has 15 citations in the OpenAlex counts PICO Portal stores.
When was Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process published?
PICO Portalyear
Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process has 2005 year in the PICO Portal index.
What is the open-access status of Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process?
PICO Portaloa status
Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process has bronze oa status in the PICO Portal index.
What is the DOI of Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process?
PICO Portaldoi
The DOI for Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process is on the source record.
What is the OpenAlex record for Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process?
PICO Portalopenalex
The OpenAlex for Dual-Frequency Superimposed RF Capacitive-Coupled Plasma Etch Process is on the source record.