PICO Portalanswers from OpenAlex
Dry etch challenges for CD shrinkage in memory process
PaperCitations, authors & open-access status
Dry etch challenges for CD shrinkage in memory process is a paper indexed in PICO Portal from OpenAlex.
How many citations does Dry etch challenges for CD shrinkage in memory process have?
PICO Portalcitation count
Dry etch challenges for CD shrinkage in memory process has 6 citations in the OpenAlex counts PICO Portal stores.
When was Dry etch challenges for CD shrinkage in memory process published?
PICO Portalyear
Dry etch challenges for CD shrinkage in memory process has 2015 year in the PICO Portal index.
What is the open-access status of Dry etch challenges for CD shrinkage in memory process?
PICO Portaloa status
Dry etch challenges for CD shrinkage in memory process has closed oa status in the PICO Portal index.
What is the DOI of Dry etch challenges for CD shrinkage in memory process?
PICO Portaldoi
The DOI for Dry etch challenges for CD shrinkage in memory process is on the source record.
What is the OpenAlex record for Dry etch challenges for CD shrinkage in memory process?
PICO Portalopenalex
The OpenAlex for Dry etch challenges for CD shrinkage in memory process is on the source record.