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A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow

PaperCitations, authors & open-access status

A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow is a paper indexed in PICO Portal from OpenAlex.

How many citations does A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow have?

PICO Portalcitation count

A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow has 89 citations in the OpenAlex counts PICO Portal stores.

When was A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow published?

PICO Portalyear

A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow has 2019 year in the PICO Portal index.

What is the open-access status of A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow?

PICO Portaloa status

A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow has closed oa status in the PICO Portal index.

What is the DOI of A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow?

PICO Portaldoi

The DOI for A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow is on the source record.

What is the OpenAlex record for A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow?

PICO Portalopenalex

The OpenAlex for A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow is on the source record.

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